UNIVERSITY OF BUCHAREST
FACULTY OF PHYSICS

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Conference: Bucharest University Faculty of Physics 2002 Meeting


Section: Optics, Spectroscopy, Plasma and Lasers


Title:
Excimer Ultraviolet Radiation Source


Authors:
*Luminita Ciobotaru, *Petrica Chiru, **Catalin Neacsu,*Geavit Musa


Affiliation:
*National Institute for Laser, Plasma and Radiation Devices

PO Box MG 36, Bucharest Romania

**University of Bucharest, Department of Physics

PO Box Mg 11, Bucharest Romania


E-mail


Keywords:


Abstract:
Halogens are chemically reactive gases. Special materials and construction technologies were necessary for producing commercially available excimer lasers. Because of the high costs, such solutions cannot be used in the development of cheep excimer UV sources. We can consider a PDP dielectric barrier device as suitable to generate a discharge in an excimer gas mixture. We built a linear PDP device made of two glass plates having each one deposited aluminum film electrodes (width = 3mm). These two electrodes were covered with dielectric layers and then sealed parallel to each other. This type of discharge is convenient for generating the excimer discharges. We used two types of gas mixtures, namely He+Xe+Cl2 and Ne+Xe+Cl2. The Xe+Cl2 excimer emission spectrum is an intense band centered on 308 nm. Because the excimer radiation is due to the heavy particle collisions, one may expect an increase in its generation with the total pressure of the gas mixture. A continuous increase of the halogen component do not lead in the case of Ne+Xe+Cl2 gas mixture to the increase of the relative intensity of the excimer radiation because of a quenching process. For given values of the Ne and Xe content in the triple gas mixture, there is an optimum percentage of chlorine for which a maximum emission of excimer radiation is obtained. In our experiment the mixture He+Cl2+Xe appeared to be much more efficient in UV light generation than Ne+Cl2+Xe. The PDP dielectric barrier discharge is easy to be made and a low cost source of excimer UV radiation. Further researches are necessary in order to establish the optimum values of the parameters controlling excimer radiation and long-term compatibility.