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UNIVERSITY OF BUCHAREST FACULTY OF PHYSICS Guest 2024-11-23 18:34 |
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Conference: Bucharest University Faculty of Physics 2002 Meeting
Section: Optics, Spectroscopy, Plasma and Lasers
Title: PULSED LASER DEPOSITION OF PMN THIN FILMS: A PARAMETRIC STUDY
Authors: 1D. Brodoceanu, 1M. Morar, . 2F. Craciun, 2P. Verardi, , 3C. Galassi, 1C. Grigoriu, 1M. Dinescu
Affiliation: 1 National Institute for Laser, Plasma and Radiation Physics, PO Box MG–36 Magurele, Bucharest, 76900, Romania, 2CNR-IDAC, Rome, Italy, 3CNR-IRTEC, Faenza, Italy
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Abstract: Pb(Mg1/3Nb2/3)O3/La0.5Sr0.5CoO3 (PMN/LSCO) heterostructures have been deposited by laser ablation. A parametric study has been performed to evidence the influence of the laser wavelength (265 nm, 355 nm, 530 nm and 1060 nm), laser fluence (2-25 J/cm2), oxygen pressure (0.2-0.8 mbar) and substrate temperature (400-700 0C) on the dielectric constant and on the piezoelectric properties. The film composition was studied by Secondary Ion Mass Spectroscopy (SIMS) and their crystallinity by X-Ray Diffraction (XRD) techniques. The room temperature small-signal dielectric constant and loss factor of the films has been measured on structures with 1mm x 1mm evaporated Au top electrodes, by using an impedance analyzer. Pyroclore free PMN films have been obtained for UV laser ablation and substrate temperature higher than 600 0C. A columnar structure was evidenced by cross-section Scanning Electron Microscopy (SEM). The obtained values of the relative dielectric constant have been found to be superior to 2000, depending on the film crystallinity and orientation.
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