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UNIVERSITY OF BUCHAREST
FACULTY OF PHYSICS Guest
2024-11-23 17:43 |
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Conference: Bucharest University Faculty of Physics 2002 Meeting
Section: Optics, Spectroscopy, Plasma and Lasers
Title:
INVESTIGATION OF THE EMITTING SPECIES IN A REMOTE RF PLASMA
IN ARGON/NITROGEN/ACETYLENE ADMIXTURES
Authors:
C. Petcu1, B. Mitu2, S. Vizireanu2, D. Crintea2, E. Raiciu2, G. Dinescu2
Affiliation:
1Bucharest University, Faculty of Physics
2 National Institute for Lasers, Plasma and Radiation Physics, MG 16-Magurele Bucharest, 76900 Romania
E-mail
Keywords:
Abstract:
A parametric study of the emitting species in a remote RF plasma working in Ar/N2/C2H2 admixtures is presented in this contribution. A capacitively coupled RF discharge was generated in a small size chamber between two parallel electrodes, in flowing gas (Ar/N2 at various ratios), by using a RF power supply at 13.56 MHz and power in the range of 0-500 W. The plasma expands into a processing chamber through a 2 mm hole (nozzle), due to the pressure gradient between the chambers. The acetylene gas is introduced in the discharge at 5 cm from the nozzle exit via an injection ring.
The spectra are recorded in the plasma expansion, using a typical spectral chain consisting in focusing quartz lens ¡V optical fiber ¡V monochromator ¡V photomultiplier ¡V amplifier ¡V acquisition system. The working conditions for plasma have been: the RF power 100-300 W, the Ar flow 100-2000 sccm, the N2 and C2H2 flow 0-20 sccm.
In the most general case, namely working in Ar/N2/C2H2 admixture, one can see the appearance of various lines and bands, corresponding to Ar lines, N2 SPS (C3ƒÀu ¡VB3ƒÀg), C2 Swan (d3ƒÀg ¡Va3ƒÀu), CN violet (B2ƒÃ ¡VA2ƒÀ), and CH (A2ƒ´ ¡VX2ƒÀ) spectral systems. Also, weak bands related to NO, NH emission due to the residual gas in the reactor are present. The behavior of the relative intensities of these bands on the applied RF power and the gas flows are presented and discussed.
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