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UNIVERSITY OF BUCHAREST
FACULTY OF PHYSICS Guest
2024-11-23 18:34 |
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Conference: Bucharest University Faculty of Physics 2009 Meeting
Section: Optics, Spectroscopy, Plasma and Lasers
Title:
Micro-structures in SU-8 Photoresist Material
Authors:
FLORIN JIPA1), MARIAN ZAMFIRESCU 1), IULIAN IONITA 2), RAZVAN DABU 1)
Affiliation:
1) National Institute for Laser Plasma and Radiation Physics - INFLPR , Atomistilor 409, 077125 Magurele, Bucharest, Romania
2) Bucharest University, Faculty of Physics, Romania
E-mail
florin.jipa@inflpr.ro
Keywords:
Abstract:
The nanotechnology has many areas of application, from structuring of semiconductors for electronic devices to the development of scaffolds tissue for medicine using hybrid polymers. By focusing the laser beam at diffraction limit, good quality and reproducible microstructures with sub micron resolution can be obtained on photosensitive resins.
In this paper are presented different structures with resolution at the order of 1 µm created in SU-8 photoresist deposited on glass and silica substrate, using TPP (Two Photon Polymerization ) technique.
With a similar technique, more complex structures can be created, with applications for optical devices, like photonic crystals or metamaterials sensors.
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