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UNIVERSITY OF BUCHAREST
FACULTY OF PHYSICS Guest
2024-11-22 1:30 |
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Conference: Bucharest University Faculty of Physics 2010 Meeting
Section: Optics, Spectroscopy, Plasma and Lasers
Title:
Optical techniques for high voltage lines MEMS measurements
Authors:
Mircea Bulinski (1), Gabriel Moagar-Poladian (2)
Affiliation:
(1) University of Bucharest, Faculty of Physics, Department of Optics, PO Box MG11, 077125, Bucharest, Romania
(2) National Institute for Research and Development in Microtechnology, Bucharest, Romania
E-mail
mbulinsky@lycos.com
Keywords:
Interferometry, MEMS, high voltage
Abstract:
Microelectromechanical systems (MEMS) is the technology of the very small systems and technology. We analyze the range and capability of some techniques, with their numerical simulations, for high voltage lines measurements using optical and interferometric setups. The methods are: image intensity variations, confocal illumination, light deflection and the self-mixing effects in semiconductor lasers with optical feedback.
The research work is supported by the National Authority for Scientific Research (RO) projects No. MEMS-IT nr. 21-031 la PN II / 2007.
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