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UNIVERSITY OF BUCHAREST
FACULTY OF PHYSICS Guest
2024-11-23 18:07 |
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Conference: Bucharest University Faculty of Physics 2002 Meeting
Section: Optics, Spectroscopy, Plasma and Lasers
Title:
PROPERTIES OF ZrO2 THIN FILMS PREPARED BY LASER ABLATION
Authors:
1D. G. Matei, 1M. Morar, 1G. Epurescu, 2A. Ferrari, 2M. Balucani, 2G. Lamedica, 1G. Dinescu, 1C. Grigoriu, 1M. Dinescu
Affiliation:
1 National Institute for Laser, Plasma and Radiation Physics, PO Box MG–36 Magurele, Bucharest, 76900, Romania, 2 INFM, Unit E6, University "La Sapienza", Rome, Italy
E-mail
Keywords:
Abstract:
Zirconium oxide, in a pure or part of compounds forms, is an important material having a large range of applications in ferroelectrics, as hard, chemical and abrazive resistant coatings, optical electrochromic windows, transparent and conductive layers and dielectric films in microelectronics. We prepared ZrO2 thin films by laser ablation of Zr and/or ZrO2 targets in vacuum and oxygen reactive atmosphere, on various substrates. X-ray diffraction, Secondary Ion Mass Spectroscopy, Electron Microscopy, electrical (dielectric constant) and optical absorption measurements have been performed to characterize the deposited layers. The influence of the deposition parameters as laser wavelength (l= 265 nm, 355 nm, 530 nm and 1060 nm), laser fluence, oxygen pressure, on the composition, structure and morphology of the deposited layers has been investigated. The nature of plasma plume species and their distribution in the plasma volume have been studied by optical emission spectroscopy. The spectra appeareance is analyzed in relation to the atomic peculiarities of the chemical elements involved. The correlation between the plasma conditions and the film properties is discussed.
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