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UNIVERSITY OF BUCHAREST
FACULTY OF PHYSICS Guest
2024-11-24 21:16 |
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Conference: Bucharest University Faculty of Physics 2012 Meeting
Section: Solid State Physics and Materials Science
Title:
Carbon/Metal Nanocomposite and Multilayer Structures Obtained by Combined PECVD and Magnetron Sputtering techniques
Authors:
T. ACSENTE(1) , A. SEGAL(2), V. MARASCU(3) , Daniela DRAGOMAN(2), G. DINESCU(1)
Affiliation:
(1) National Institute for Laser, Plasma and Radiation Physics, Bucharest - Magurele, Romania Atomistilor 409/ PO BOX MG16
(2) Faculty of Physics, University of Bucharest, Atomistilor 405, Magurele, Romania
(3) Faculty of Mathematics, University of Bucharest, Academiei 14, Bucharest, Romania
E-mail
tomy@infim.ro
Keywords:
metal/carbon multilayer, composite films, sequential deposition
Abstract:
Nanocomposites and multilayer structures of hydrogenated carbon and metal (a-C:H/Me) have applications in various fields of science and technology: tribology, sensors, X-ray optics, solar absorbers, etc. Previously, we have presented a novel plasma deposition method for synthesis of hydrogenated carbon and metal nanocomposites, sequential deposition method, pointing out on the peculiarities of our method. Such as, in our approach the metallic and a-C:H components are added to the deposited film by alternatively exposing the substrate to two plasma sources mounted on the same deposition chamber: a magnetron source (MS) for metal incorporation and a Plasma Enhanced Chemical Vapour Deposition (PECVD) source (with acetylene precursor) for a-C:H deposition. In contrast, the majority of methods reported in literature add simultaneously these components to the deposited layers. The properties (elemental content and structure) of the sequentially deposited layers depend strongly on the duration of substrate exposure to the mentioned plasma sources. In the present contribution we will review some of the aspects of the sequential deposition method and we will highlight the deposition parameters which differentiate between deposition of nanocomposites and multilayered a-C:H/Me structures.
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