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UNIVERSITY OF BUCHAREST
FACULTY OF PHYSICS Guest
2024-11-22 1:49 |
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Conference: Bucharest University Faculty of Physics 2005 Meeting
Section: Optics, Spectroscopy, Plasma and Lasers
Title:
Determination of refractive index of silicon and HPR photorezist
Authors:
Bojan Mihaela, V. Damian, Iuliana Iordache, P.C. Logofatu, R.Muller*, D.Cristea*
Affiliation:
National Institute for Laser, Plasma and Radiation, P.O.Box MG-36, Laser Interferometry Laboratory, Bucharest, Romania.
*National Institute for Reasearch and Development in Microtehnologies
E-mail
mihaelafiz@yahoo.com
Keywords:
refractive index measurement, photorezist, fitting
Abstract:
In recent years, significant advances have been made in the formulation of a number of positive photoresists. Sophisticated photoresists are the backbone of integrated circuit manufacturers because without them today`s submicron geometries would have been impossible. Such photoresists are also the basis for optical integrated circuits, sensors (biological, chemical, so.), and some of MEMS systems with application in information processing.
After review of the refractive index measurement methods we present our own method consisting in obtaining n by fitting the reflectivity Rp around the Brewster angle, with measured data.
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