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UNIVERSITY OF BUCHAREST
FACULTY OF PHYSICS Guest
2024-11-23 18:18 |
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Conference: Bucharest University Faculty of Physics 2014 Meeting
Section: Polymer Physics
Title:
Plasma Polymerization Reactor
Authors:
V. COVLEA(1), B. BUTOI(1), D. STAICU(1), R. BEREZOVSKI(1), Cristina BEREZOVSKI(1)
Affiliation:
(1) University of Bucharest, Faculty of Physics, 405 Atomistilor, Magurele-Ilfov, 077125, Romania
E-mail
bogdan.butoi@g.unibuc.ro
Keywords:
plasma polymerization, thin film deposition, plasma reactor, monomer
Abstract:
Plasma, the 4-th state of the matter, is the most abundant entity in the Universe, composing about 99.99% of matter. Man-made plasmas are anywhere in our lives, from fire, public illumination, to plasma welding.
Plasma polymerization is a technique used also in thin film deposition that offers some advantages with respect to the classical polymerization methods. The main advantages of this method are the high accuracy in obtaining the film thickness and the possibility to use certain monomers that otherwise cannot be polymerized by classical methods. The high interest in thin film development led us to design and build a plasma polymerization reactor, in order to create thin polymer films for various applications. The direct current (DC) plasma is highly suitable for this task, offering a low temperature discharge with room-temperature ions in the positive column. In the present work we describe the design and main features of the newly built plasma reactor.
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