| |
 |
UNIVERSITY OF BUCHAREST
FACULTY OF PHYSICS Guest
2024-11-22 2:19 |
 |
|
|
|
Conference: Bucharest University Faculty of Physics 2015 Meeting
Section: Solid State Physics and Materials Science
Title:
Applications and properties of chromium in precision optics
Authors:
Nicoleta VASILE(1), B.BITA(1,2), R.GAVRILA(2), A.DINESCU(2), Stefan ANTOHE(1)
Affiliation:
1) Faculty of Physics, University of Bucharest, 405 Atomistilor street, 077125, Magurele, Romania
2) National Institute for R & D in Microtechnologies (IMT), Erou Iancu Nicolae Str. 126A, Bucharest 077190, Romania
E-mail
nicoleta209@yahoo.com
Keywords:
optical components, chromium layers, electron microscope
Abstract:
This paper refers to optical coatings consisting of thin layers of chromium obtained by vacuum evaporation techniques, designed to be used in optical components. Chromium layers show a good chemical stability, adhesion and good mechanical strength, which recommends them for use in the production of reticles groom scale by photolithographic processes.
Successive layers (60 nm thick) were deposited. After each deposition step the surface of the films was investigated by optical and scanning electron microscopy (SEM). It was found that the substrate pre-processing step is the most important in determining the quality of chrome plating.
|
|
|
|