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UNIVERSITY OF BUCHAREST
FACULTY OF PHYSICS Guest
2024-11-22 2:28 |
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Conference: Bucharest University Faculty of Physics 2015 Meeting
Section: Optics, Spectroscopy, Plasma and Lasers
Title:
Optical and structural characterization of YSZ thin films deposited by excimer laser ablation for planar potentiometric oxygen sensors applications
Authors:
R. PASCU, G. EPURESCU, B. MITU, A. MOLDOVAN, R. BIRJEGA, D. COLCEAG, M. DINESCU
Affiliation:
National Institute for Laser, Plasma and Radiation Physics, Atomistilor Str., No. 409, PO Box MG-36, 077125, Magurele, Bucharest, Romania
E-mail
rovena.pascu@inflpr.ro
Keywords:
Planar Potentiometric Oxygen Sensors, YSZ thin films, PLD, XRD, SIMS, AFM, VASE
Abstract:
It was performed optical and structural characterization of Yttria Stabilized Zirconia (YSZ) thin films prepared by pulsed laser deposition (PLD) on Si (100) and Pt/Si(100) substrates from the ablation of a 8YSZ target by ArF excimer laser. X-ray Diffraction (XRD) analysis stated othorombic films with [111] preferential orientation for Pt/ Si substrate and cubic phase for Si(100) substrate. Secondary Ion Mass Spectrometry (SIMS) investigation shows a stoichiometric transfer of target composition to the substrates. Atomic Force Microscopy (AFM) and Variable Angle Spectroscopic Ellipsometry (VASE) determined the thickness, roughness and refractive index of film. Ellipsometric data were obtained with Cauchy model in the spectral range 400-1000 nm, at three angle of incidence 60, 65 and 70. It was obtained high-k dense YSZ thin film deposited on Si (100) with applications for electrolyte of ionic devices, like oxygen sensors
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