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UNIVERSITY OF BUCHAREST FACULTY OF PHYSICS Guest 2024-11-22 2:24 |
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Conference: Bucharest University Faculty of Physics 2015 Meeting
Section: Solid State Physics and Materials Science
Title: Functional thin films based on zinc oxide for transparent electronics
Authors: Liliana M. TRINCA(1,2), Aurelian C. GALCA(2), Andra G. BONI(1,2), Lucian PINTILIE(2)
Affiliation: 1) Faculty of Physics, University of Bucharest, 405 Atomistilor Street, PO Box MG-11, 077125, Magurele-Ilfov, Romania
2) National Institute of Materials Physics, 105 bis Atomistilor Str., 077125 Magurele, Ilfov, Romania
E-mail liliana.trinca@infim.ro
Keywords: zinc oxide, transparent electronics, epitaxial thin films
Abstract: Zinc oxide (ZnO), a transparent material in the visible spectrum, is attractive for electronic applications due to its low price and possibility of varying the electrical properties. Slight doping with aluminum leads to a transparent conductive oxide which is proposed to replace the more expensive ITO (Sn:In2O3). On the other hand, highly resistive zinc oxide is obtained by doping with lithium, which can be suitable as gate dielectric in thin film transistors. In order to avoid electrical properties alteration of thin films and multilayered structures as a result of extended defects, epitaxial-like thin films are mandatory when the research is focused on the intrinsic properties.
In this work will be presented a comparative study of zinc oxide based epilayers and polycrystalline thin films, in respect with the structural, optical and electrical properties. Epitaxial structures are achieved on single crystal substrates (SrTiO3 and ZnO), while the polycrystalline thin films are obtained on silicon and fused silica substrates.
Acknowledgement: Liliana M. Trinca acknowledges strategic grant POSDRU/159/1.5/S/13775
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