UNIVERSITY OF BUCHAREST
FACULTY OF PHYSICS

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Conference: Bucharest University Faculty of Physics 2015 Meeting


Section: Optics, Spectroscopy, Plasma and Lasers


Title:
Design and optical characterization of TiO2-SiO2 multilayers obtained by RF magnetron sputtering


Authors:
Iulian PANA(1,2), Catalin VITELARU(2), Adrian KISS(2), Mariana BRAIC(2), Gheorghe DINESCU(1,3)


Affiliation:
1)Faculty of Physics, University of Bucharest, 405 Atomistilor St., Magurele, Ilfov, 077125, Romania

2)National Institute for Optoelectronics, 409 Atomistilor St., Magurele, Ilfov, 077125, Romania

3)National Institute for Laser, Plasma and Radiation Physics, 409 Atomistilor St., Magurele, Ilfov, 077125, Romania


E-mail
iulian.pana@inoe.ro


Keywords:
magnetron sputtering, multilayer structures, optical coatings


Abstract:
Nowadays, the optical coatings consisting of dielectric alternating layers have attracted much attention for their large-scale applications. So far, many research studies have pointed out the advantages of using the SiO2 and TiO2 materials in different applications, because of their attractive optical and electronic properties [1,2]. For this reason, the SiO2 and TiO2 single thin layers prepared at room temperature by physical vapor deposition processes are suitable candidates to be used in the fabrication of optical filters and antireflective coatings. The aim of the present study is to develop and optimize specific theoretical designs by using dedicated software (Optilayer Ltd.) [3], in order to produce TiO2-SiO2 multilayer structures. The optical properties of individual monolayers, obtained by radio-frequency magnetron sputtering, are used as input parameters for the optical modelling. Consequently, the obtained multilayer structures contain already the experimentally measured optical properties of available monolayers. The experimental spectral photometric curves are in a good agreement with the optical simulations, with typical discrepancies less than a few percent.


References:

[1] Mazur M, Wojcieszak D, Domaradzki J, Kaczmarek D, Song S, Placido F. TiO2/SiO2 multilayer as an antireflective and protective coating deposited by microwave assisted magnetron sputtering. Opto-Electronics Review. 2013;21(2):233-8.

[2] Poxson DJ, Mont FW, Schubert MF, Kim JK, Cho J, Schubert EF. Demonstration of optical interference filters utilizing tunable refractive index layers. Optics Express. 2010;18(23):A594-A9.

[3] Tikhonravov AV and Trubetskov MK, OptiLayer thin film software, http://www.optilayer.com.



Acknowledgement:
Acknowledgement: Funding by the Romanian National Authority for Scientific Research, UEFISCDI, through project PN09-270203.