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UNIVERSITY OF BUCHAREST
FACULTY OF PHYSICS Guest
2024-11-22 2:07 |
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Conference: Bucharest University Faculty of Physics 2015 Meeting
Section: Optics, Spectroscopy, Plasma and Lasers
Title:
Interferometric imaging at nanoscale for microsystems characterization
Authors:
Tiberius VASILE(1,2), Victor DAMIAN(1)
Affiliation:
1) National Institute for Laser Plasma and Radiation Physics, Str. Atomistilor 409, Magurele 077125, Romania,
2) Faculty of Physics, University of Bucharest, Str. Atomistilor 405, Magurele 077125, Romania
E-mail
tiberius.vasile@inflpr.ro
Keywords:
nanoscale imaging, phase unwrapping, spatial light modulator SLM, microsystems
Abstract:
In this paper we describe an interferometric method that encompasses a Michelson interferometer with no moving parts. By placing a spatial light modulator (SLM) in the reference arm of the interferometer we have managed to eliminate the need of using any mechanical delay lines in the system, that in time are prone to error and fatigue. The system’s wide field of view and free air operation, marks an advantage
References:
[1] Dennis C.Ghiglia, Mark D. Pritt, Two-Dimensional Phase Unwrapping(A Wiley-Interscience Publication), Chapter 2, (1997)
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