UNIVERSITY OF BUCHAREST
FACULTY OF PHYSICS

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2024-11-23 18:26

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Conference: Bucharest University Faculty of Physics 2016 Meeting


Section: Optics, Spectroscopy, Plasma and Lasers


Title:
Metal nanoparticles mobilization by laser based processes


Authors:
A.I. BERCEA (1,2), A. Ojeda-Gonzalez-Posada(3), X. YAO(3), A. Palla PAPAVLU(1,3), T. ACSENTE(1), G.DINESCU(1), T.LIPPERT(3), Maria DINESCU(1)


Affiliation:
1) National Institute for Lasers, Plasma, and Radiation Physics, 409 Atomistilor, 077125 Magurele, Romani

2) University of Bucharest, Faculty of Physics, 405 Atomistilor, 077125, Magurele, Romania

3) Energy and Environment Department, Paul Scherrer Institute, 5232 Villigen PSI, Switzerland



E-mail
bercea_adrian.ionut@yahoo.com


Keywords:
ITER, laser cleaning, nanoparticles mobilization


Abstract:
This work deals with the optimization of the laser based cleaning process of tungsten nanoparticles from nonconventional substrates. Within the recent years the interest regarding the cleaning/mobilization of nanoparticles has reached new heights due to the problems that dust nanoparticles raises in facilities such as ITER (international thermonuclear experimental reactor) or in semiconductor based application. By employing an excimer laser we investigate the removal of tungsten nanoparticles from a silicon substrate. The tungsten nanoparticles are produced and deposited on the substrate through magnetron sputtering combined with gas aggregation. The nanoparticles have a flower-like aspect and form a thin and compact layer on the surface of the substrate. In order to optimize the nanoparticles cleaning conditions, different laser fluences and number of pulses (per laser irradiation sequence) were used. Moreover, these parameters were selected in such a way that the silicon substrate suffers minimal damages. In addition, in order to improve even more the particle removal efficiency, the tungsten samples were investigated by scanning electron microscopy, Raman spectroscopy, X-ray diffraction, and profilometry prior and post laser irradiation. Information about the particles ejection mechanism was extracted by performing plasma imaging, under vacuum and also in atmospheric conditions. Our results indicate that laser cleaning is a powerful technique that could be successfully applied in different applications.


Acknowledgement:
The authors acknowledge the financial support provided in the frame of Romania-France IFA-CEA collaboration, project DUSTCO code C4-13. Financial support from the Paul Scherrer Institut and the National Authority for Research and Innovation in the frame of Nucleus program- contract 4N/2016 is gratefully acknowledged.