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UNIVERSITY OF BUCHAREST
FACULTY OF PHYSICS Guest
2024-11-23 18:11 |
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Conference: Bucharest University Faculty of Physics 2017 Meeting
Section: Solid State Physics and Materials Science
Title:
Synthesis and characterization of TiO2 thin films deposited by rf-magnetron sputtering
Authors:
Daniela DOGARU (1,2), Aurelian C. GALCA (2), Lucian ION (1)
Affiliation:
1) Faculty of Physics, University of Bucharest, Atomistilor 405, 077125, Magurele, Romania
2) National Institute of Materials Physics, Atomistilor 405A, 077125, Magurele, Romania
E-mail
daniela.dogaru@infim.ro
Keywords:
oxide semiconductors, rf-sputtering
Abstract:
TiO2 thin films have been deposited by rf-magnetron sputtering on glass substrates using a metallic Ti target. Structural and optical analysis of samples prepared in different deposition conditions is presented. X-ray diffraction data has confirmed a high-degree disordered structure of the semiconductor thin films. By controlling the oxygen partial pressure a variation of the absorption coefficient is observed giving a primary insight into the electronic band structure of the films. The effect of the substrate temperature on the physical properties is also taken into consideration. A brief description of the dependence of the growth rate on the oxygen concentration and the applied cathode power is provided. The morphological and optical investigations are based on atomic force microscopy and spectroscopic ellipsometry.
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