Faculty of Physics - University of Bucharest

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FACULTY OF PHYSICS

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2024-11-22 1:32

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Conference: Bucharest University Faculty of Physics 2018 Meeting

Section: Optics, Spectroscopy, Plasma and Lasers

Title:

Various morphologies of tungsten nanoparticles obtained by magnetron sputtering gas aggregation method

Authors:

Tomy ACSENTE (1), Lavinia Gabriela CARPEN (1,2), Elena MATEI (3), Gheorghe DINESCU (1)

Affiliation:

1) National Institute for Laser, Plasma and Radiation Physics, Atomistilor 409 str., Magurele, Romania

2) Faculty of Physics - University of Bucharest, Atomistilor 405 str., Magurele, Romania

3) National Institute of Materials Physics, Atomistilor 105 str., Magurele, Romania

E-mail

tomy@infim.ro

Keywords:

magnetron sputtering, gas aggregation, nanoparticles, tungsten

Abstract:

Cluster sources based on magnetron sputtering discharge combined with gas aggregation are valuable tools for producing nanoparticles from various materials. Previously, we used this method for obtaining tungsten nanoparticles (WNPs) with controlled morphologies (flower like [1], concave hexapods and cube-octahedra [2]). In this work we present the variation of the deposited WNPs morphologies when two process parameters are systematically varied: i) working gas mass flow rate (Argon, in between 5–11 sccm), keeping constant the discharge power (100 W), and ii) the discharge power (in between 60-20 W), keeping constant the Ar mass flow rate (5 sccm). Secondary electron microscopy investigations show that the deposited samples obtained at 60 W and a mass flow rate of 5 sccm Ar presents nanoflowers shape while in those obtained at 80 W presents multiple branches (up to eight) distributed in preferential spatial directions. For the other parameters the samples of nanoparticles present mixed morphologies (spherical, nanoflowers, and even cubes). Still the increase of the WNPs dimension is observed when the applied discharge power is increased.

References:

[1] T. Acsente, et al., Eur. Phys. J. D 69 (2015) 161.

[2] T. Acsente, et al., Materials Letters 200 (2017) 121–124.

Acknowledgement:

This work was performed through the Romanian Core Program developed with the support of MCI, projects 3N/16.03.2018, PN 18-11/2018, and EURATOM project WP_ENR2-RO.