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UNIVERSITY OF BUCHAREST
FACULTY OF PHYSICS Guest
2024-11-22 2:21 |
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Conference: Bucharest University Faculty of Physics 2021 Meeting
Section: Solid State Physics and Materials Science
Title:
Yttrium Oxide Thin Films Prepared by Pulsed Laser Deposition
Authors:
Rovena Pascu
Affiliation:
National Institute for Laser, Plasma and Radiation Physics
Atomistilor Str., No. 409, PO Box MG-16, 077125, Magurele, Bucharest, Romania
E-mail
rovena.pascu@inflpr.ro
Keywords:
Pulsed Laser Deposition, Yttirum Oxide, Oxygen sensor, Electrolytes, Sensing Element, Cauchy and Cauchy - Urbach model
Abstract:
Yttrium oxide (Y2O3) thin films were deposited on Si (100) 500oC and 600oC substrate temperature by Pulsed Laser Deposition (PLD) at Y2O3. The thin film was characterized using X-ray reflection, Atomic Force Microscopy, Scanning electron microscopy, electron energy loss spectroscopy measurements, X-ray photoelectron spectroscopy and spectroscopic ellipsometry measurements using the Cauchy and Cauchy - Urbach model.
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