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UNIVERSITY OF BUCHAREST
FACULTY OF PHYSICS Guest
2024-11-22 1:56 |
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Conference: Bucharest University Faculty of Physics 2021 Meeting
Section: Optics, Spectroscopy, Plasma and Lasers
Title:
RF Plasma device for supercapacitor carbon electrodes etching
Authors:
George Zarnescu (1), Adela Bara (1), Mihai Badic (1), Valentin Girleanu (1)
Affiliation:
1) INCDIE ICPE-CA, Splaiul Unirii 313, Bucharest, Romania
E-mail
gzarnescu@gmail.com
Keywords:
radio frequency, plasma, supercapacitors
Abstract:
Here we propose a vacuum plasma device that can be used for capacitive and inductive coupling at the same time.
One capacitive electrode can be moved together with a glass and red silicone-covered stainless-steel rod to decrease and increase the distance from 100mm up to 300mm. Also, the coil can be moved along the 90mm diameter, 500mm length quartz tube in the same distance range.
By having these two mechanical adjustments the device can be used for many other experimental setups, to observe and further adjust the plasma characteristics, not only to obtain very large surface carbon electrodes. DC and RF produced plasma was investigated for a vacuum range between 2 Torr and 0.003 Torr and by adjusting the voltage from 700 V up to 1200V. Experiments showed that a 1.8-2 MHz or/and 13.5 MHz RF excited plasma is a much more stable and precise process than a DC-controlled plasma, where large graphite chunks can be ripped apart without any control.
3D simulations were made to see the complete plasma characteristics for different voltages, pressures, electrode distances, and different working gases.
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