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2024-11-23 17:39

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Conference: Bucharest University Faculty of Physics 2023 Meeting

Section: Solid State Physics and Materials Science, Optics, Spectroscopy, Plasma and Lasers

Title:

Fabrication and charactherisation of micro-transistors

Authors:

Maria-Adela TANASE (1,2), Cristina BESLEAGA (1), Lucian ION (2)

Affiliation:

1) National Institute of Materials Physics (INCDFM), Atomiștilor Street 405A, Măgurele 077125, Ilfov, România

2) Faculty of Physics, University of Bucharest, Atomiștilor Street 405 , 077125 Măgurele, Ilfov, Romania

E-mail

maria.tanase6@s.unibuc.ro

Keywords:

PDMS, strechable, humidity sensor, thin film transistor, transparent

Abstract:

As technology advanced, the requirement for smaller functional devices (high device density) that meet the needs of contemporary life became mandatory. This is how the micro-transistor was brought to life [1]. Further upgrade of the transistors towards fully transparent and flexible is essential for a wider range of applications [2] like electronic skins or wearable sensors. In our study, we developed the incipient phase of a strechable thin film transistor (TFT) based on a PDMS (Polydimethylsiloxane) membrane and also fabricated transistors on rigid substrate [2],[3]. The fabrication techniques used were magnetron sputtering, spin-coating, and photolitography. Atomic force microscopy (AFM) was used to analyze the devices. The electrical response of the obtained transistors was assessed in normal atmospheric conditions and also in various humidity level to check its functionality as humidity sensor. In the future, we intend to fully develop an utilizable stretchable and transparent transistor.

References:

[1] Andrew C. Tickle ; Thin-Film Transistors. A New Approach to Microelectronics, John Wiley & Sons , Inc., 1969

[2] Yahao Dai et al. ; Stretchable transistors and functional circuits for human-integrated electronics, 2021

[3] Gilles Horowitz*; Organic Field-Effect Transistors, 1998

Acknowledgement:

Core Program of the National Institute of Materials Physics, granted by the Romanian Ministry of Research, Innovation and Digitalization through the Project PC2-PN23080202.