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UNIVERSITY OF BUCHAREST
FACULTY OF PHYSICS Guest
2024-11-23 17:51 |
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Conference: Bucharest University Faculty of Physics 2023 Meeting
Section: Physics Education
Title:
Modeling electrostatically actuated MEMS cantilever beam
Authors:
Andreea GOIA(1), Cayuss Andrei MIHĂIȚOAIA (1) Tiberius O. CHECHE(1)
Affiliation:
1) University of Bucharest, Faculty of Physics, P.O.Box MG-11, RO-077125, Bucharest – Măgurele, Romania
E-mail
tiberius.cheche@unibuc.ro
Keywords:
MEMS, actuation voltage, cantilever beam
Abstract:
The cantilever beam for micro-electromechanical systems (MEMS) switch is basically a switch controlled by electrostatic forces acting on two plates of a capacitor. The top moving plate is an elastic beam with a certain polarity, while the bottom fixed plate has opposite polarity. At the actuation voltage the beam becomes unstable and collapses to the down state closing the switch. The elastic deformation is described by the Euler–Bernoulli beam equations. The orientation of the top moving plate is taken into account. The theoretical model is compared with experimental results.
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