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UNIVERSITY OF BUCHAREST
FACULTY OF PHYSICS Guest
2025-07-06 14:20 |
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Conference: Bucharest University Faculty of Physics 2025 Meeting
Section: Solid State Physics and Materials Science
Title:
BST thin films
Authors:
Maria Adela Tănase (1,2), Lucian Ion(1), Nicu Scărișoreanu (2)
Affiliation:
1) University of Bucharest
2) INFLPR-C400
E-mail
tanase.maria6@s.unibuc.ro
Keywords:
BST, large area, PLD, tunable filters, high dielectric constant, small losses
Abstract:
The vast expansion of of modern technologies, particularly in the field of microelectronics and telecommunications, has created a need for advanced materials capable of supporting high-frequency operation. The subject of my study addresses the demand occurred in the field by focusing on the fabrication and optimization of materials for high-frequency electronic filters.(1)
The study centers on barium strontium titanate (BST), a complex perovskite oxide known for its high dielectric constant, low insertion losses, and strong compatibility with CMOS architectures. These properties make BST a desirable and advantageous material for tunable devices and miniaturized filter applications. In our experiments, BST thin films were deposited using a pulsed laser deposition(PLD) system , with particular attention paid to film uniformity, crystallinity, and substrate influence on the material. Both standard silicon and conductive silicon substrates were investigated for their effectiveness as bottom electrodes in future device integration.(1)(2)
Overall, this research contributes to the broader objective of producing efficient, scalable, and cost-effective filter structures that could significantly impact next-generation communication systems, defense technologies, and integrated electronics. The groundwork laid in this study opens the way toward future device fabrication and large-area deposition processes.
References:
1) author = {Ralph Levi and Seymour B. Cohn },
title= {A History of Microwave Filter Research,
Design, and Development},
JOURNAL = {IEEE Transactions On Microwave Theory And Techniques,no.9},
year = {1984},
month = {September}
2) AUTHOR = {David S. Ginley },
TITLE = {Handbook of transparent conductors},
PUBLISHER = {Springer},
YEAR = {2010},
3) author = { Songzhan Li Æ Yanqin Yang Æ L. Liu Æ T. J. Zhang Æ
W. H. Huang },
title= {Influence of deposition parameters on preferred orientation of RF magnetron sputtered BST thin films},
JOURNAL = {Springer Science + Business Media},
year = {2008},
Acknowledgement:
I would like to express my sincere gratitude to my mentors for their continuous support and guidance throughout this work. I also extend my thanks to my colleagues for their valuable help in processing and characterizing some of the samples.
This work was performed using C400 PHOTOPLASMAT facilities, within Program LAPLAS VII – contract no. 30N/2023.
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