UNIVERSITY OF BUCHAREST
FACULTY OF PHYSICS

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Conference: Bucharest University Faculty of Physics 2006 Meeting


Section: Optics, Spectroscopy, Plasma and Lasers


Title:
Spatial distribution of a nitrogen plasma jet emission in the nozzle proximity


Authors:
I. Luciu (1), C. Dragomir (2), E. R. Ionita (1), G. Dinescu (1), M. Bazavan (2), I. Iova (2)


Affiliation:
1()National Institute for Laser, Plasma and Radiation Physics, Low Temperature Plasma Physics Department, PO Box MG - 36, Magurele - 077125, Bucharest, Romania

(2)Faculty of Physics, University of Bucharest, Magurele , Bucharest Romania


E-mail
dinescug@infim.ro


Keywords:
radiofrequency plasma, nitrogen plasma emission


Abstract:
Radiofrequency generated expanding plasmas, at low or high pressure are useful tools for interaction studies and plasma technologies. The knowledge of their properties is important for process control. In this contribution we report on the emission characteristics of a nitrogen plasma jet at low pressure in the nozzle proximity.The plasma was generated in a small discharge (16 mm diameter) chamber in flowing nitrogen (1000 sccm) by applying a radiofrequency field (13.56 MHz, 250 Watt) between two parallel disk shaped electrodes (4-10 mm interelectrodic distance). From the discharge chamber the plasma expanded through the grounded electrode which is used as nozzle in a stainless steel cylindrical chamber of 20 cm in diameter and 100 cm long. The plasma emission was investigated by Optical Emission Spectroscopy with a system consisting of a focusing lens, optical fiber and Optical Multichannel Analyser(OMA). The spectra were recorded in the 200-1000nm spectral range along the flow axis, at different radial positions by moving the lens and the fiber. From the processed spectra three dimensional maps of the emission of the First Positive and Second Positive Spectral Systems were obtained and compared. The ratio of the emission of the two spectral systems can be used for a gross estimation of the space distribution of electron temperature in the plasma jet.