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UNIVERSITY OF BUCHAREST
FACULTY OF PHYSICS Guest
2024-11-22 2:16 |
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Conference: Bucharest University Faculty of Physics 2004 Meeting
Section: Optics, Spectroscopy, Plasma and Lasers
Title:
Properties of BaTiO3 thin films deposited BY RADIOFREQUENCY discharge ASSISTED PULSED LASER DEPOSITION
Authors:
S. Canulescu, G. Dinescu, G. Epurescu, D.G. Matei, C. Grigoriu, M. Dinescu*,
A. Moldovan
Affiliation:
National Institute for Lasers, Plasma and Radiation Physics
PO Box MG–16, RO-76900, Bucharest, Romania
E-mail
Keywords:
Laser ablation, Dielectric constant, Radiofrequency assisted PLD, Ablation film deposition
Abstract:
Barium titanate (BTO) is a very attractive material for a large area of applications as nonvolatile memories, surface acoustic wave devices, tunable capacitors, pyroelectric detectors. Ferroelectric BaTiO3 (BTO) thin films were grown on Pt coated Si substrates by radiofrequency discharge assisted Pulsed Laser Deposition (RF-PLD). A pulsed YAG-Nd laser, wavelength 355 nm, pulse length 5 ns, repetition rate 5 Hz and incident fluence in the range of 2-3 J/cm2 was used to irradiate a BTO ceramic target in oxygen reactive atmosphere. The radio frequency plasma discharge (power RF of about 50-200 W in a O2 gas flow ranged from 1-100 sccm) produced a beam of excited and ionized species which was directed to substrate surface. A comparison between films obtained with or without RF discharge has been carried out. X-ray diffraction and Atomic Force Microscopy analysis have been performed to investigate the crystalline structure and surface morphology of the BaTiO3 films.
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