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UNIVERSITY OF BUCHAREST
FACULTY OF PHYSICS Guest
2024-11-23 17:59 |
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Conference: Bucharest University Faculty of Physics 2009 Meeting
Section: Optics, Spectroscopy, Plasma and Lasers
Title:
Influence of the discharge configuration and iodine doping on the properties of plasma polymerized polythiophene thin films
Authors:
V. Satulu (1), G. Aldica(2), B. Mitu(1), G. Dinescu(1)
Affiliation:
1National Institute for Laser, Plasma and Radiation Physics,
PO Box MG 36, 077125, Bucharest-Magurele, Romania
2 National Institute of Materials Physics, P.O. Box MG-7, Bucharest-Magurele, 077125, Romania
E-mail
veronica.satulu@infim.ro
Keywords:
polythiophene, plasma polymerization, direct discharge RF plasma, post discharge RF plasma
Abstract:
This work presents results on the synthesis of polythiophene like thin films in different RF discharge plasma configurations, aiming to preserve the monomer structure. Moreover, in order to optimize the material conductivity, ex-situ iodine doping of the as deposited samples has been realized.
The first type of experiments were carried out using a Bell-Jar reactor in which the RF active electrode was built as a shower, allowing the precursor admission in the reactor, while the substrates were placed on the grounded electrode. The depositions have been performed using RF powers in the range 5 – 30 W, Ar flow 10 sccm, thiophene flow in the range 0.5 – 4 g/h.
In the second type of experiments the discharge was generated in argon flow (10-100 sccm) in a small volume glass chamber and expanded in the main processing chamber through a small nozzle performed in the bottom electrode. The monomer is introduced in the reactor chamber in in the postdischarge, where the the plasma polymerization processes lead to thin film growth.
The ionic and neutral species formed in both discharge configurations have been studied by mass spectrometry (MS). The deposited material was characterized by Fourier transform infrared spectroscopy (FTIR), atomic force microscopy (AFM), spectroscopic ellipsometry (SE), and electrical measurement. A significant improvement of conductivity was encountered for iodine doped samples deposited in postdischarge configuration.
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