UNIVERSITY OF BUCHAREST
FACULTY OF PHYSICS

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Conference: Bucharest University Faculty of Physics 2014 Meeting


Section: Solid State Physics and Materials Science


Title:
Properties of the carbon layers deposited by RF plasma jet discharge at different substrate temperatures


Authors:
Mijaela ACOSTA GENTOIU(1,2), V. MARASCU(3), L. ION(1), D. STOICA(3), G. DINESCU(3)


Affiliation:
1) Faculty of Physics, University of Bucharest, Romania

2) Faculty of Physics, University of Sonora, Mexico

3) National Institute for Laser, Plasma and Radiation Physics, Bucharest, Romania


E-mail
mgentoiu@gmail.com


Keywords:
nanomaterials, carbon nanowalls, PECVD, RF plasma jet


Abstract:
The characteristics of the carbon nanomaterials, like the morphology, structure and the nature of the bonds, are important in view of their applications. In this work carbon layers were obtained by plasma enhanced chemical vapor deposition technique (PECVD), in a low pressure plasma jet discharge with carbon species supplied by acetylene injected into argon in presence of hydrogen. The effect of substrate temperature on the properties of the synthesized materials was investigated from 200°C to 600°C. For analyzing the chemical peculiarities, the samples were studied by Fourier Transform Infrared Spectrometry (FTIR). In addition, the morphological changes were determined by Scanning Electron Microscopy (SEM). In the FTIR spectra we found a series of IR absorption bands that characterize specifically the benzenoid aromatic systems. A trend of structural modification from amorphous carbon toward polycrystalline graphite with increasing substrate temperature is observed. Also, the incorporation of hydrogen diminishes at higher deposition temperatures. From SEM images we observed that the deposited nanostructures changed with the temperature increase, evolving from carbon nanofibers with no preferential orientation to carbon nanowalls (CNW) vertically grown on substrate.

Acknowledgments: This work was supported by a grant of the Romanian Ministry of National Education, CNCS - UEFISCDI, project number PN-II-ID-PCE-2012-4-0629. One of the authors, M.A.G, acknowledges the grant of CONACYT, Mexico for the supporting stage in the Faculty of Physics, University of Bucharest.