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FACULTY OF PHYSICS

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2024-11-23 18:17

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Conference: Bucharest University Faculty of Physics 2014 Meeting

Section: Solid State Physics and Materials Science

Title:

Study of the physical properties of different metallic oxides obtained by thermal oxidation

Authors:

Sorina IFTIMIE(1), A. RADU(1), L. ION(1), J. MERIGEON(2), Mihaela GIRTAN(2), S. ANTOHE(1)

Affiliation:

1) MDEO Research Center, Faculty of Physics, University of Bucharest, Magurele-Ilfov, Romania

2) LPHIA Laboratory, LUNAM – Angers University, France

E-mail

sorina.iftimie@fizica.unibuc.ro

Keywords:

oxides, thin films, thermal oxidation

Abstract:

ZnO, AZO, ITO and TiO2 oxides thin films were obtained by direct thermal oxidation from sputtered metallic layers (Zn, Zn:Al, In:Sn and Ti, respectively). The thermal treatment was gradually performed from room temperature (RT) to 550°C, in open atmosphere. The morphological, structural, optical and electrical properties of the obtained oxides thin films were studied. The sample’s surface was analyzed by atomic force microscopy (AFM, contact mode) and scanning electron microscopy (SEM). The structural features were determined by X-ray measurements and the optical investigations revealed a good transmittance in the visible range (300 – 800 nm). The electrical behavior was investigated by van der Pauw method (300 – 10 K). This study showed that direct thermal oxidation can be used to obtain transparent oxides, potentially conductive, used as buffer or dielectric layers. Acknowledgments: S.I. is grateful to the Pays de la Loire and Angers University for the post-doc fellowship No 2012-12029 financial support.