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UNIVERSITY OF BUCHAREST
FACULTY OF PHYSICS Guest
2024-11-22 1:37 |
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Conference: Bucharest University Faculty of Physics 2024 Meeting
Section: Nuclear and Elementary Particles Physics
Title:
In-situ temperature measurements during ion implantation
Authors:
Decebal IANCU(1,2), Ion BURDUCEA(1), Radu-Florin ANDREI(1), Mihai STRATICIUC(1), Alexandru JIPA(2), Gihan VELIȘA(1)
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Affiliation:
1) Horia Hulubei National Institute for Physics and Nuclear Engineering, Măgurele, IF 077125, Romania
2)University of Bucharest, Faculty of Physics, Măgurele, IF 077125, Romania
E-mail
iancu.decebal@gmail.com
Keywords:
ion implantation; measurement of temperature;3MV Tandetron accelerator
Abstract:
Accurate measurement of temperature during ion implantation/irradiation is required in both fundamental and applied physics experiments, because defect dynamics is strongly dependent on the irradiation temperature. In turn, this affects the properties of irradiated samples. In vacuum systems, there are a limited number of standard techniques for measuring sample surface temperatures.
Such a development was implemented on the IIB, "Ion Implantation Beamline", one of the three beamlines owned by the 3MV HVEE Tandetron accelerator of IFIN-HH.
References:
[1] R.F Andrei, D.Iancu,Romanian Journal of Physics 67, 302 (2022)
[2] G.Velișa, et al., The European Physical Journal Plus 136(11):1171
Acknowledgement:
This research was funded by The National Research Program “Nucleu”, Project code PN 23210201/2023.
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